Rapid-deployment wafer macro defect inspection module
Project snapshot
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Challenge
Deliver a high-performance inspection module on a compressed schedule
The OEM needed a macro defect inspection module that integrated seamlessly with their wafer sorter. The module had to enable front- and back-side visual inspection under uniform illumination, meet stringent cleanliness standards, and include a BOLTS-compatible interface for future flexibility—all within a tight timeline.
Innovation
Compact, precise wafer inspection with superior cleanliness
AIR developed a macro defect inspection module that combined high precision and ultra-clean operation. Key innovations included:
- Four-axis wafer gimbal mechanism for precise rotation and positioning.
- Failsafe edge grip to securely hold wafers without damage.
- Halogen light source with fiber-optic delivery and post-optics to provide uniform illumination with minimal heat load.
- Achieved better than Class 1 cleanliness through CFD modeling and mini-ULPA fan filter units.
- BOLTS-compatible interface to allow integration with future product versions.
Result
High-quality inspection system delivered rapidly
The first unit was delivered to the OEM in 12 weeks and installed at the end customer fab two weeks later. The system met all performance, cleanliness, and integration requirements, enabling the OEM to secure the large wafer sorter order.
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